By analyzing phenomena at the atomic/molecular scale and integrating nanoscale processing and surface/reaction control technologies, we are developing new manufacturing technology and improving productivity in the field of electronic devices miniaturized rapidly, and infrastructure systems such as for energy and for environment.
Process technology for semiconductors
We are developing advanced patterning and fabrication techniques, wafer cleaning processes, advanced material analytical services, and TCAD/CAE modelling and simulation techniques to reduce mass production development time and enhance the manufacturability of these products.
Targeting near-future applications, we are also investigating CNT synthesis and ALD process development, as well as their applications.
New devices and process applications
We are developing new technologies,related to energy,water treatment and lighting systems,based on semiconductor's process technologies. We are aiso developing biosensors and their application to healthcare and food inspection.